Open Access
Table 2
EUVS-C optical elements and geometry.
| Element | Parameters | Comments |
|---|---|---|
| Entrance slit | 0.1 mm × 0.5 mm | Slit – grating separation: 200.0 mm |
| Grating | 464.55 mm | Incidence angle: α = 32.6° |
| Radius of curvature | 4549.4 g/mm | Diffraction angle: β = 47.5° |
| Ruling density | Grating – mirror separation: 169.9 mm | |
| Mirror | 340.6, 297.5 mm | Incidence angle: 10.0° |
| Radii of curvature | Mirror – filter separation: 179.1 mm | |
| Filter | 1 mm | Two 1 mm thick substrates one carrying a 18 nm wide bandpass filter and the other a 0.29 – 1.1 mm blocking filter |
| Substrate thickness | Filter – detector separation: 10 mm | |
| Detector | 512 × 1 | Custom anti-reflection coated window blocks light for 60 diodes for dark current monitoring 24 pC ~1.5 × 108 e− |
| Format | 0.025 × 2.5 mm | |
| Pixel size | 24 pC | |
| Charge capacity | 1500 e− per DN | |
| Gain | 3500 e− | |
| Read noise | 6.25 × 105 e−/s | |
| Dark current | 4.65 × 103 e−/s | |
| @+25 °C | ||
| @−10 °C |
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